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Kuznetsov V. S., Maiorov D. V., Andreev P. A.
   Fabrication of Tuning-Fork Gyroscope Resonator using Directed Chemical Etching of Fused Silica / Kuznetsov V. S., Maiorov D. V., Andreev P. A. - DOI 10.18698/0236-3933-2019-4-32-44 // Вестник МГТУ им. Н. Э. Баумана. Сер. Приборостроение. - 2019. - № 4. - С. 32-44.

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DOI 10.18698/0236-3933-2019-4-32-44

https://doi.org/10.18698/0236-3933-2019-…

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The article presents the results of the experimental and practical work devoted to the study of directed chemical etching of fused silica locally exposed to ultra-short pulsed laser radiation as a way to produce sensitive elements of precision instruments of orientation, stabilization and navigation as resonators of tuning fork gyroscopes. The essence of the directed chemical etching method is presented. The created experimental setup structure and components are purposed and the laser processing and chemical etching operational modes are described. The laser processing mode obtained as a result of the experiment was used to fabricate the tuning fork gyroscope resonator. The etching rate of exposed fused silica in 5 % hydrofluoric acid is 27.5 to 68.8 µm/hour. That is much faster than the etching rate of the non-affected material. Based on this results the application of the method in the precision instruments fabrication area can be considered promising and subjected to further study